[
    {
        "serialNumber": "20UPGM23210737",
        "testType": "FLATNESS",
        "subtestType": "",
        "results": {
            "property": {
                "ANALYSIS_VERSION": null,
                "MEASUREMENT_DATE": null,
                "MEASUREMENT_DURATION": null,
                "TEMP": 23.1,
                "HUM": 50.0,
                "OPERATOR_IDENTITY": "Francesco",
                "TOOL_TECHNIQUE": "1",
                "FLATNESS_MEASUREMENT_VERSION": "0.0.9.dev67"
            },
            "comment": "",
            "Metadata": {
                "QCHELPER_VERSION": "0.0.9.dev67",
                "ModuleSN": "20UPGM23210737",
                "TimeStart": 1741957607,
                "properties": {
                    "HUM": 50.0,
                    "TEMP": 23.1,
                    "OPERATOR_IDENTITY": "Francesco",
                    "TOOL_TECHNIQUE": "1"
                },
                "results": {
                    "BACKSIDE_FLATNESS": 31.0,
                    "FLATNESS_MEASUREMENT_POINTS": [
                        [
                            1015.0,
                            1063.0,
                            160.0
                        ],
                        [
                            1015.0,
                            1063.0,
                            160.0
                        ],
                        [
                            5515.0,
                            1063.0,
                            191.0
                        ],
                        [
                            5515.0,
                            1063.0,
                            191.0
                        ],
                        [
                            10015.0,
                            1063.0,
                            222.0
                        ],
                        [
                            10015.0,
                            1063.0,
                            222.0
                        ],
                        [
                            14515.0,
                            1063.0,
                            252.0
                        ],
                        [
                            14515.0,
                            1063.0,
                            252.0
                        ],
                        [
                            19015.0,
                            1063.0,
                            283.0
                        ],
                        [
                            19015.0,
                            1063.0,
                            283.0
                        ],
                        [
                            23515.0,
                            1063.0,
                            316.0
                        ],
                        [
                            23515.0,
                            1063.0,
                            316.0
                        ],
                        [
                            28015.0,
                            1063.0,
                            342.0
                        ],
                        [
                            28015.0,
                            1063.0,
                            342.0
                        ],
                        [
                            32515.0,
                            1063.0,
                            371.0
                        ],
                        [
                            32515.0,
                            1063.0,
                            371.0
                        ],
                        [
                            37015.0,
                            1063.0,
                            399.0
                        ],
                        [
                            37015.0,
                            1063.0,
                            399.0
                        ],
                        [
                            41515.0,
                            1063.0,
                            428.0
                        ],
                        [
                            41515.0,
                            1063.0,
                            428.0
                        ],
                        [
                            1015.0,
                            5413.0,
                            147.0
                        ],
                        [
                            1015.0,
                            5413.0,
                            147.0
                        ],
                        [
                            5515.0,
                            5413.0,
                            183.0
                        ],
                        [
                            5515.0,
                            5413.0,
                            183.0
                        ],
                        [
                            10015.0,
                            5413.0,
                            215.0
                        ],
                        [
                            10015.0,
                            5413.0,
                            215.0
                        ],
                        [
                            14515.0,
                            5413.0,
                            244.0
                        ],
                        [
                            14515.0,
                            5413.0,
                            244.0
                        ],
                        [
                            19015.0,
                            5413.0,
                            275.0
                        ],
                        [
                            19015.0,
                            5413.0,
                            275.0
                        ],
                        [
                            23515.0,
                            5413.0,
                            307.0
                        ],
                        [
                            23515.0,
                            5413.0,
                            307.0
                        ],
                        [
                            28015.0,
                            5413.0,
                            333.0
                        ],
                        [
                            28015.0,
                            5413.0,
                            333.0
                        ],
                        [
                            32515.0,
                            5413.0,
                            364.0
                        ],
                        [
                            32515.0,
                            5413.0,
                            364.0
                        ],
                        [
                            37015.0,
                            5413.0,
                            391.0
                        ],
                        [
                            37015.0,
                            5413.0,
                            391.0
                        ],
                        [
                            41515.0,
                            5413.0,
                            418.0
                        ],
                        [
                            41515.0,
                            5413.0,
                            418.0
                        ],
                        [
                            1015.0,
                            9763.0,
                            135.0
                        ],
                        [
                            1015.0,
                            9763.0,
                            135.0
                        ],
                        [
                            5515.0,
                            9763.0,
                            170.0
                        ],
                        [
                            5515.0,
                            9763.0,
                            170.0
                        ],
                        [
                            10015.0,
                            9763.0,
                            204.0
                        ],
                        [
                            10015.0,
                            9763.0,
                            204.0
                        ],
                        [
                            14515.0,
                            9763.0,
                            235.0
                        ],
                        [
                            14515.0,
                            9763.0,
                            235.0
                        ],
                        [
                            19015.0,
                            9763.0,
                            268.0
                        ],
                        [
                            19015.0,
                            9763.0,
                            268.0
                        ],
                        [
                            23515.0,
                            9763.0,
                            296.0
                        ],
                        [
                            23515.0,
                            9763.0,
                            296.0
                        ],
                        [
                            28015.0,
                            9763.0,
                            324.0
                        ],
                        [
                            28015.0,
                            9763.0,
                            324.0
                        ],
                        [
                            32515.0,
                            9763.0,
                            354.0
                        ],
                        [
                            32515.0,
                            9763.0,
                            354.0
                        ],
                        [
                            37015.0,
                            9763.0,
                            381.0
                        ],
                        [
                            37015.0,
                            9763.0,
                            381.0
                        ],
                        [
                            41515.0,
                            9763.0,
                            405.0
                        ],
                        [
                            41515.0,
                            9763.0,
                            405.0
                        ],
                        [
                            1015.0,
                            14113.0,
                            120.0
                        ],
                        [
                            1015.0,
                            14113.0,
                            120.0
                        ],
                        [
                            5515.0,
                            14113.0,
                            158.0
                        ],
                        [
                            5515.0,
                            14113.0,
                            158.0
                        ],
                        [
                            10015.0,
                            14113.0,
                            191.0
                        ],
                        [
                            10015.0,
                            14113.0,
                            191.0
                        ],
                        [
                            14515.0,
                            14113.0,
                            224.0
                        ],
                        [
                            14515.0,
                            14113.0,
                            224.0
                        ],
                        [
                            19015.0,
                            14113.0,
                            254.0
                        ],
                        [
                            19015.0,
                            14113.0,
                            254.0
                        ],
                        [
                            23515.0,
                            14113.0,
                            286.0
                        ],
                        [
                            23515.0,
                            14113.0,
                            286.0
                        ],
                        [
                            28015.0,
                            14113.0,
                            313.0
                        ],
                        [
                            28015.0,
                            14113.0,
                            313.0
                        ],
                        [
                            32515.0,
                            14113.0,
                            341.0
                        ],
                        [
                            32515.0,
                            14113.0,
                            341.0
                        ],
                        [
                            37015.0,
                            14113.0,
                            367.0
                        ],
                        [
                            37015.0,
                            14113.0,
                            367.0
                        ],
                        [
                            41515.0,
                            14113.0,
                            389.0
                        ],
                        [
                            41515.0,
                            14113.0,
                            389.0
                        ],
                        [
                            1015.0,
                            18463.0,
                            105.0
                        ],
                        [
                            1015.0,
                            18463.0,
                            105.0
                        ],
                        [
                            5515.0,
                            18463.0,
                            143.0
                        ],
                        [
                            5515.0,
                            18463.0,
                            143.0
                        ],
                        [
                            10015.0,
                            18463.0,
                            178.0
                        ],
                        [
                            10015.0,
                            18463.0,
                            178.0
                        ],
                        [
                            14515.0,
                            18463.0,
                            211.0
                        ],
                        [
                            14515.0,
                            18463.0,
                            211.0
                        ],
                        [
                            19015.0,
                            18463.0,
                            243.0
                        ],
                        [
                            19015.0,
                            18463.0,
                            243.0
                        ],
                        [
                            23515.0,
                            18463.0,
                            271.0
                        ],
                        [
                            23515.0,
                            18463.0,
                            271.0
                        ],
                        [
                            28015.0,
                            18463.0,
                            299.0
                        ],
                        [
                            28015.0,
                            18463.0,
                            299.0
                        ],
                        [
                            32515.0,
                            18463.0,
                            325.0
                        ],
                        [
                            32515.0,
                            18463.0,
                            325.0
                        ],
                        [
                            37015.0,
                            18463.0,
                            351.0
                        ],
                        [
                            37015.0,
                            18463.0,
                            351.0
                        ],
                        [
                            41515.0,
                            18463.0,
                            373.0
                        ],
                        [
                            41515.0,
                            18463.0,
                            373.0
                        ],
                        [
                            1015.0,
                            22813.0,
                            88.0
                        ],
                        [
                            1015.0,
                            22813.0,
                            88.0
                        ],
                        [
                            5515.0,
                            22813.0,
                            127.0
                        ],
                        [
                            5515.0,
                            22813.0,
                            127.0
                        ],
                        [
                            10015.0,
                            22813.0,
                            160.0
                        ],
                        [
                            10015.0,
                            22813.0,
                            160.0
                        ],
                        [
                            14515.0,
                            22813.0,
                            192.0
                        ],
                        [
                            14515.0,
                            22813.0,
                            192.0
                        ],
                        [
                            19015.0,
                            22813.0,
                            222.0
                        ],
                        [
                            19015.0,
                            22813.0,
                            222.0
                        ],
                        [
                            23515.0,
                            22813.0,
                            257.0
                        ],
                        [
                            23515.0,
                            22813.0,
                            257.0
                        ],
                        [
                            28015.0,
                            22813.0,
                            284.0
                        ],
                        [
                            28015.0,
                            22813.0,
                            284.0
                        ],
                        [
                            32515.0,
                            22813.0,
                            310.0
                        ],
                        [
                            32515.0,
                            22813.0,
                            310.0
                        ],
                        [
                            37015.0,
                            22813.0,
                            336.0
                        ],
                        [
                            37015.0,
                            22813.0,
                            336.0
                        ],
                        [
                            41515.0,
                            22813.0,
                            355.0
                        ],
                        [
                            41515.0,
                            22813.0,
                            355.0
                        ],
                        [
                            1015.0,
                            27163.0,
                            72.0
                        ],
                        [
                            1015.0,
                            27163.0,
                            72.0
                        ],
                        [
                            5515.0,
                            27163.0,
                            110.0
                        ],
                        [
                            5515.0,
                            27163.0,
                            110.0
                        ],
                        [
                            10015.0,
                            27163.0,
                            143.0
                        ],
                        [
                            10015.0,
                            27163.0,
                            143.0
                        ],
                        [
                            14515.0,
                            27163.0,
                            174.0
                        ],
                        [
                            14515.0,
                            27163.0,
                            174.0
                        ],
                        [
                            19015.0,
                            27163.0,
                            202.0
                        ],
                        [
                            19015.0,
                            27163.0,
                            202.0
                        ],
                        [
                            23515.0,
                            27163.0,
                            237.0
                        ],
                        [
                            23515.0,
                            27163.0,
                            237.0
                        ],
                        [
                            28015.0,
                            27163.0,
                            263.0
                        ],
                        [
                            28015.0,
                            27163.0,
                            263.0
                        ],
                        [
                            32515.0,
                            27163.0,
                            292.0
                        ],
                        [
                            32515.0,
                            27163.0,
                            292.0
                        ],
                        [
                            37015.0,
                            27163.0,
                            318.0
                        ],
                        [
                            37015.0,
                            27163.0,
                            318.0
                        ],
                        [
                            41515.0,
                            27163.0,
                            340.0
                        ],
                        [
                            41515.0,
                            27163.0,
                            340.0
                        ],
                        [
                            1015.0,
                            31513.0,
                            57.0
                        ],
                        [
                            1015.0,
                            31513.0,
                            57.0
                        ],
                        [
                            5515.0,
                            31513.0,
                            94.0
                        ],
                        [
                            5515.0,
                            31513.0,
                            94.0
                        ],
                        [
                            10015.0,
                            31513.0,
                            126.0
                        ],
                        [
                            10015.0,
                            31513.0,
                            126.0
                        ],
                        [
                            14515.0,
                            31513.0,
                            154.0
                        ],
                        [
                            14515.0,
                            31513.0,
                            154.0
                        ],
                        [
                            19015.0,
                            31513.0,
                            182.0
                        ],
                        [
                            19015.0,
                            31513.0,
                            182.0
                        ],
                        [
                            23515.0,
                            31513.0,
                            218.0
                        ],
                        [
                            23515.0,
                            31513.0,
                            218.0
                        ],
                        [
                            28015.0,
                            31513.0,
                            246.0
                        ],
                        [
                            28015.0,
                            31513.0,
                            246.0
                        ],
                        [
                            32515.0,
                            31513.0,
                            272.0
                        ],
                        [
                            32515.0,
                            31513.0,
                            272.0
                        ],
                        [
                            37015.0,
                            31513.0,
                            298.0
                        ],
                        [
                            37015.0,
                            31513.0,
                            298.0
                        ],
                        [
                            41515.0,
                            31513.0,
                            323.0
                        ],
                        [
                            41515.0,
                            31513.0,
                            323.0
                        ],
                        [
                            1015.0,
                            35863.0,
                            39.0
                        ],
                        [
                            1015.0,
                            35863.0,
                            39.0
                        ],
                        [
                            5515.0,
                            35863.0,
                            73.0
                        ],
                        [
                            5515.0,
                            35863.0,
                            73.0
                        ],
                        [
                            10015.0,
                            35863.0,
                            105.0
                        ],
                        [
                            10015.0,
                            35863.0,
                            105.0
                        ],
                        [
                            14515.0,
                            35863.0,
                            133.0
                        ],
                        [
                            14515.0,
                            35863.0,
                            133.0
                        ],
                        [
                            19015.0,
                            35863.0,
                            161.0
                        ],
                        [
                            19015.0,
                            35863.0,
                            161.0
                        ],
                        [
                            23515.0,
                            35863.0,
                            197.0
                        ],
                        [
                            23515.0,
                            35863.0,
                            197.0
                        ],
                        [
                            28015.0,
                            35863.0,
                            225.0
                        ],
                        [
                            28015.0,
                            35863.0,
                            225.0
                        ],
                        [
                            32515.0,
                            35863.0,
                            252.0
                        ],
                        [
                            32515.0,
                            35863.0,
                            252.0
                        ],
                        [
                            37015.0,
                            35863.0,
                            279.0
                        ],
                        [
                            37015.0,
                            35863.0,
                            279.0
                        ],
                        [
                            41515.0,
                            35863.0,
                            303.0
                        ],
                        [
                            41515.0,
                            35863.0,
                            303.0
                        ],
                        [
                            1015.0,
                            40213.0,
                            18.0
                        ],
                        [
                            1015.0,
                            40213.0,
                            18.0
                        ],
                        [
                            5515.0,
                            40213.0,
                            52.0
                        ],
                        [
                            5515.0,
                            40213.0,
                            52.0
                        ],
                        [
                            10015.0,
                            40213.0,
                            81.0
                        ],
                        [
                            10015.0,
                            40213.0,
                            81.0
                        ],
                        [
                            14515.0,
                            40213.0,
                            112.0
                        ],
                        [
                            14515.0,
                            40213.0,
                            112.0
                        ],
                        [
                            19015.0,
                            40213.0,
                            141.0
                        ],
                        [
                            19015.0,
                            40213.0,
                            141.0
                        ],
                        [
                            23515.0,
                            40213.0,
                            173.0
                        ],
                        [
                            23515.0,
                            40213.0,
                            173.0
                        ],
                        [
                            28015.0,
                            40213.0,
                            200.0
                        ],
                        [
                            28015.0,
                            40213.0,
                            200.0
                        ],
                        [
                            32515.0,
                            40213.0,
                            228.0
                        ],
                        [
                            32515.0,
                            40213.0,
                            228.0
                        ],
                        [
                            37015.0,
                            40213.0,
                            256.0
                        ],
                        [
                            37015.0,
                            40213.0,
                            256.0
                        ],
                        [
                            41515.0,
                            40213.0,
                            282.0
                        ],
                        [
                            41515.0,
                            40213.0,
                            282.0
                        ]
                    ]
                },
                "Institution": "LPNHE"
            },
            "Measurements": {
                "BACKSIDE_FLATNESS": {
                    "X": false,
                    "Unit": "um",
                    "Values": [
                        31.0
                    ]
                },
                "FLATNESS_MEASUREMENT_POINTS": {
                    "X": false,
                    "Unit": "um",
                    "Values": [
                        [
                            1015.0,
                            1063.0,
                            160.0
                        ],
                        [
                            1015.0,
                            1063.0,
                            160.0
                        ],
                        [
                            5515.0,
                            1063.0,
                            191.0
                        ],
                        [
                            5515.0,
                            1063.0,
                            191.0
                        ],
                        [
                            10015.0,
                            1063.0,
                            222.0
                        ],
                        [
                            10015.0,
                            1063.0,
                            222.0
                        ],
                        [
                            14515.0,
                            1063.0,
                            252.0
                        ],
                        [
                            14515.0,
                            1063.0,
                            252.0
                        ],
                        [
                            19015.0,
                            1063.0,
                            283.0
                        ],
                        [
                            19015.0,
                            1063.0,
                            283.0
                        ],
                        [
                            23515.0,
                            1063.0,
                            316.0
                        ],
                        [
                            23515.0,
                            1063.0,
                            316.0
                        ],
                        [
                            28015.0,
                            1063.0,
                            342.0
                        ],
                        [
                            28015.0,
                            1063.0,
                            342.0
                        ],
                        [
                            32515.0,
                            1063.0,
                            371.0
                        ],
                        [
                            32515.0,
                            1063.0,
                            371.0
                        ],
                        [
                            37015.0,
                            1063.0,
                            399.0
                        ],
                        [
                            37015.0,
                            1063.0,
                            399.0
                        ],
                        [
                            41515.0,
                            1063.0,
                            428.0
                        ],
                        [
                            41515.0,
                            1063.0,
                            428.0
                        ],
                        [
                            1015.0,
                            5413.0,
                            147.0
                        ],
                        [
                            1015.0,
                            5413.0,
                            147.0
                        ],
                        [
                            5515.0,
                            5413.0,
                            183.0
                        ],
                        [
                            5515.0,
                            5413.0,
                            183.0
                        ],
                        [
                            10015.0,
                            5413.0,
                            215.0
                        ],
                        [
                            10015.0,
                            5413.0,
                            215.0
                        ],
                        [
                            14515.0,
                            5413.0,
                            244.0
                        ],
                        [
                            14515.0,
                            5413.0,
                            244.0
                        ],
                        [
                            19015.0,
                            5413.0,
                            275.0
                        ],
                        [
                            19015.0,
                            5413.0,
                            275.0
                        ],
                        [
                            23515.0,
                            5413.0,
                            307.0
                        ],
                        [
                            23515.0,
                            5413.0,
                            307.0
                        ],
                        [
                            28015.0,
                            5413.0,
                            333.0
                        ],
                        [
                            28015.0,
                            5413.0,
                            333.0
                        ],
                        [
                            32515.0,
                            5413.0,
                            364.0
                        ],
                        [
                            32515.0,
                            5413.0,
                            364.0
                        ],
                        [
                            37015.0,
                            5413.0,
                            391.0
                        ],
                        [
                            37015.0,
                            5413.0,
                            391.0
                        ],
                        [
                            41515.0,
                            5413.0,
                            418.0
                        ],
                        [
                            41515.0,
                            5413.0,
                            418.0
                        ],
                        [
                            1015.0,
                            9763.0,
                            135.0
                        ],
                        [
                            1015.0,
                            9763.0,
                            135.0
                        ],
                        [
                            5515.0,
                            9763.0,
                            170.0
                        ],
                        [
                            5515.0,
                            9763.0,
                            170.0
                        ],
                        [
                            10015.0,
                            9763.0,
                            204.0
                        ],
                        [
                            10015.0,
                            9763.0,
                            204.0
                        ],
                        [
                            14515.0,
                            9763.0,
                            235.0
                        ],
                        [
                            14515.0,
                            9763.0,
                            235.0
                        ],
                        [
                            19015.0,
                            9763.0,
                            268.0
                        ],
                        [
                            19015.0,
                            9763.0,
                            268.0
                        ],
                        [
                            23515.0,
                            9763.0,
                            296.0
                        ],
                        [
                            23515.0,
                            9763.0,
                            296.0
                        ],
                        [
                            28015.0,
                            9763.0,
                            324.0
                        ],
                        [
                            28015.0,
                            9763.0,
                            324.0
                        ],
                        [
                            32515.0,
                            9763.0,
                            354.0
                        ],
                        [
                            32515.0,
                            9763.0,
                            354.0
                        ],
                        [
                            37015.0,
                            9763.0,
                            381.0
                        ],
                        [
                            37015.0,
                            9763.0,
                            381.0
                        ],
                        [
                            41515.0,
                            9763.0,
                            405.0
                        ],
                        [
                            41515.0,
                            9763.0,
                            405.0
                        ],
                        [
                            1015.0,
                            14113.0,
                            120.0
                        ],
                        [
                            1015.0,
                            14113.0,
                            120.0
                        ],
                        [
                            5515.0,
                            14113.0,
                            158.0
                        ],
                        [
                            5515.0,
                            14113.0,
                            158.0
                        ],
                        [
                            10015.0,
                            14113.0,
                            191.0
                        ],
                        [
                            10015.0,
                            14113.0,
                            191.0
                        ],
                        [
                            14515.0,
                            14113.0,
                            224.0
                        ],
                        [
                            14515.0,
                            14113.0,
                            224.0
                        ],
                        [
                            19015.0,
                            14113.0,
                            254.0
                        ],
                        [
                            19015.0,
                            14113.0,
                            254.0
                        ],
                        [
                            23515.0,
                            14113.0,
                            286.0
                        ],
                        [
                            23515.0,
                            14113.0,
                            286.0
                        ],
                        [
                            28015.0,
                            14113.0,
                            313.0
                        ],
                        [
                            28015.0,
                            14113.0,
                            313.0
                        ],
                        [
                            32515.0,
                            14113.0,
                            341.0
                        ],
                        [
                            32515.0,
                            14113.0,
                            341.0
                        ],
                        [
                            37015.0,
                            14113.0,
                            367.0
                        ],
                        [
                            37015.0,
                            14113.0,
                            367.0
                        ],
                        [
                            41515.0,
                            14113.0,
                            389.0
                        ],
                        [
                            41515.0,
                            14113.0,
                            389.0
                        ],
                        [
                            1015.0,
                            18463.0,
                            105.0
                        ],
                        [
                            1015.0,
                            18463.0,
                            105.0
                        ],
                        [
                            5515.0,
                            18463.0,
                            143.0
                        ],
                        [
                            5515.0,
                            18463.0,
                            143.0
                        ],
                        [
                            10015.0,
                            18463.0,
                            178.0
                        ],
                        [
                            10015.0,
                            18463.0,
                            178.0
                        ],
                        [
                            14515.0,
                            18463.0,
                            211.0
                        ],
                        [
                            14515.0,
                            18463.0,
                            211.0
                        ],
                        [
                            19015.0,
                            18463.0,
                            243.0
                        ],
                        [
                            19015.0,
                            18463.0,
                            243.0
                        ],
                        [
                            23515.0,
                            18463.0,
                            271.0
                        ],
                        [
                            23515.0,
                            18463.0,
                            271.0
                        ],
                        [
                            28015.0,
                            18463.0,
                            299.0
                        ],
                        [
                            28015.0,
                            18463.0,
                            299.0
                        ],
                        [
                            32515.0,
                            18463.0,
                            325.0
                        ],
                        [
                            32515.0,
                            18463.0,
                            325.0
                        ],
                        [
                            37015.0,
                            18463.0,
                            351.0
                        ],
                        [
                            37015.0,
                            18463.0,
                            351.0
                        ],
                        [
                            41515.0,
                            18463.0,
                            373.0
                        ],
                        [
                            41515.0,
                            18463.0,
                            373.0
                        ],
                        [
                            1015.0,
                            22813.0,
                            88.0
                        ],
                        [
                            1015.0,
                            22813.0,
                            88.0
                        ],
                        [
                            5515.0,
                            22813.0,
                            127.0
                        ],
                        [
                            5515.0,
                            22813.0,
                            127.0
                        ],
                        [
                            10015.0,
                            22813.0,
                            160.0
                        ],
                        [
                            10015.0,
                            22813.0,
                            160.0
                        ],
                        [
                            14515.0,
                            22813.0,
                            192.0
                        ],
                        [
                            14515.0,
                            22813.0,
                            192.0
                        ],
                        [
                            19015.0,
                            22813.0,
                            222.0
                        ],
                        [
                            19015.0,
                            22813.0,
                            222.0
                        ],
                        [
                            23515.0,
                            22813.0,
                            257.0
                        ],
                        [
                            23515.0,
                            22813.0,
                            257.0
                        ],
                        [
                            28015.0,
                            22813.0,
                            284.0
                        ],
                        [
                            28015.0,
                            22813.0,
                            284.0
                        ],
                        [
                            32515.0,
                            22813.0,
                            310.0
                        ],
                        [
                            32515.0,
                            22813.0,
                            310.0
                        ],
                        [
                            37015.0,
                            22813.0,
                            336.0
                        ],
                        [
                            37015.0,
                            22813.0,
                            336.0
                        ],
                        [
                            41515.0,
                            22813.0,
                            355.0
                        ],
                        [
                            41515.0,
                            22813.0,
                            355.0
                        ],
                        [
                            1015.0,
                            27163.0,
                            72.0
                        ],
                        [
                            1015.0,
                            27163.0,
                            72.0
                        ],
                        [
                            5515.0,
                            27163.0,
                            110.0
                        ],
                        [
                            5515.0,
                            27163.0,
                            110.0
                        ],
                        [
                            10015.0,
                            27163.0,
                            143.0
                        ],
                        [
                            10015.0,
                            27163.0,
                            143.0
                        ],
                        [
                            14515.0,
                            27163.0,
                            174.0
                        ],
                        [
                            14515.0,
                            27163.0,
                            174.0
                        ],
                        [
                            19015.0,
                            27163.0,
                            202.0
                        ],
                        [
                            19015.0,
                            27163.0,
                            202.0
                        ],
                        [
                            23515.0,
                            27163.0,
                            237.0
                        ],
                        [
                            23515.0,
                            27163.0,
                            237.0
                        ],
                        [
                            28015.0,
                            27163.0,
                            263.0
                        ],
                        [
                            28015.0,
                            27163.0,
                            263.0
                        ],
                        [
                            32515.0,
                            27163.0,
                            292.0
                        ],
                        [
                            32515.0,
                            27163.0,
                            292.0
                        ],
                        [
                            37015.0,
                            27163.0,
                            318.0
                        ],
                        [
                            37015.0,
                            27163.0,
                            318.0
                        ],
                        [
                            41515.0,
                            27163.0,
                            340.0
                        ],
                        [
                            41515.0,
                            27163.0,
                            340.0
                        ],
                        [
                            1015.0,
                            31513.0,
                            57.0
                        ],
                        [
                            1015.0,
                            31513.0,
                            57.0
                        ],
                        [
                            5515.0,
                            31513.0,
                            94.0
                        ],
                        [
                            5515.0,
                            31513.0,
                            94.0
                        ],
                        [
                            10015.0,
                            31513.0,
                            126.0
                        ],
                        [
                            10015.0,
                            31513.0,
                            126.0
                        ],
                        [
                            14515.0,
                            31513.0,
                            154.0
                        ],
                        [
                            14515.0,
                            31513.0,
                            154.0
                        ],
                        [
                            19015.0,
                            31513.0,
                            182.0
                        ],
                        [
                            19015.0,
                            31513.0,
                            182.0
                        ],
                        [
                            23515.0,
                            31513.0,
                            218.0
                        ],
                        [
                            23515.0,
                            31513.0,
                            218.0
                        ],
                        [
                            28015.0,
                            31513.0,
                            246.0
                        ],
                        [
                            28015.0,
                            31513.0,
                            246.0
                        ],
                        [
                            32515.0,
                            31513.0,
                            272.0
                        ],
                        [
                            32515.0,
                            31513.0,
                            272.0
                        ],
                        [
                            37015.0,
                            31513.0,
                            298.0
                        ],
                        [
                            37015.0,
                            31513.0,
                            298.0
                        ],
                        [
                            41515.0,
                            31513.0,
                            323.0
                        ],
                        [
                            41515.0,
                            31513.0,
                            323.0
                        ],
                        [
                            1015.0,
                            35863.0,
                            39.0
                        ],
                        [
                            1015.0,
                            35863.0,
                            39.0
                        ],
                        [
                            5515.0,
                            35863.0,
                            73.0
                        ],
                        [
                            5515.0,
                            35863.0,
                            73.0
                        ],
                        [
                            10015.0,
                            35863.0,
                            105.0
                        ],
                        [
                            10015.0,
                            35863.0,
                            105.0
                        ],
                        [
                            14515.0,
                            35863.0,
                            133.0
                        ],
                        [
                            14515.0,
                            35863.0,
                            133.0
                        ],
                        [
                            19015.0,
                            35863.0,
                            161.0
                        ],
                        [
                            19015.0,
                            35863.0,
                            161.0
                        ],
                        [
                            23515.0,
                            35863.0,
                            197.0
                        ],
                        [
                            23515.0,
                            35863.0,
                            197.0
                        ],
                        [
                            28015.0,
                            35863.0,
                            225.0
                        ],
                        [
                            28015.0,
                            35863.0,
                            225.0
                        ],
                        [
                            32515.0,
                            35863.0,
                            252.0
                        ],
                        [
                            32515.0,
                            35863.0,
                            252.0
                        ],
                        [
                            37015.0,
                            35863.0,
                            279.0
                        ],
                        [
                            37015.0,
                            35863.0,
                            279.0
                        ],
                        [
                            41515.0,
                            35863.0,
                            303.0
                        ],
                        [
                            41515.0,
                            35863.0,
                            303.0
                        ],
                        [
                            1015.0,
                            40213.0,
                            18.0
                        ],
                        [
                            1015.0,
                            40213.0,
                            18.0
                        ],
                        [
                            5515.0,
                            40213.0,
                            52.0
                        ],
                        [
                            5515.0,
                            40213.0,
                            52.0
                        ],
                        [
                            10015.0,
                            40213.0,
                            81.0
                        ],
                        [
                            10015.0,
                            40213.0,
                            81.0
                        ],
                        [
                            14515.0,
                            40213.0,
                            112.0
                        ],
                        [
                            14515.0,
                            40213.0,
                            112.0
                        ],
                        [
                            19015.0,
                            40213.0,
                            141.0
                        ],
                        [
                            19015.0,
                            40213.0,
                            141.0
                        ],
                        [
                            23515.0,
                            40213.0,
                            173.0
                        ],
                        [
                            23515.0,
                            40213.0,
                            173.0
                        ],
                        [
                            28015.0,
                            40213.0,
                            200.0
                        ],
                        [
                            28015.0,
                            40213.0,
                            200.0
                        ],
                        [
                            32515.0,
                            40213.0,
                            228.0
                        ],
                        [
                            32515.0,
                            40213.0,
                            228.0
                        ],
                        [
                            37015.0,
                            40213.0,
                            256.0
                        ],
                        [
                            37015.0,
                            40213.0,
                            256.0
                        ],
                        [
                            41515.0,
                            40213.0,
                            282.0
                        ],
                        [
                            41515.0,
                            40213.0,
                            282.0
                        ]
                    ]
                }
            },
            "BACKSIDE_FLATNESS": null,
            "FLATNESS_MEASUREMENT_POINTS": null
        },
        "stage": "MODULE/FINAL_METROLOGY",
        "dbVersion": 1.01
    }
]