[
    {
        "serialNumber": "20UPGM23211111",
        "testType": "FLATNESS",
        "subtestType": "",
        "results": {
            "property": {
                "ANALYSIS_VERSION": null,
                "MEASUREMENT_DATE": null,
                "MEASUREMENT_DURATION": null,
                "TEMP": 23.0,
                "HUM": 50.0,
                "OPERATOR_IDENTITY": "Francesco",
                "TOOL_TECHNIQUE": "1",
                "FLATNESS_MEASUREMENT_VERSION": "0.0.9.dev67"
            },
            "comment": "",
            "Metadata": {
                "QCHELPER_VERSION": "0.0.9.dev67",
                "ModuleSN": "20UPGM23211111",
                "TimeStart": 1741957032,
                "properties": {
                    "HUM": 50.0,
                    "TEMP": 23.0,
                    "OPERATOR_IDENTITY": "Francesco",
                    "TOOL_TECHNIQUE": "1"
                },
                "results": {
                    "BACKSIDE_FLATNESS": 20.0,
                    "FLATNESS_MEASUREMENT_POINTS": [
                        [
                            1015.0,
                            1063.0,
                            190.0
                        ],
                        [
                            1015.0,
                            1063.0,
                            190.0
                        ],
                        [
                            5515.0,
                            1063.0,
                            244.0
                        ],
                        [
                            5515.0,
                            1063.0,
                            244.0
                        ],
                        [
                            10015.0,
                            1063.0,
                            296.0
                        ],
                        [
                            10015.0,
                            1063.0,
                            296.0
                        ],
                        [
                            14515.0,
                            1063.0,
                            346.0
                        ],
                        [
                            14515.0,
                            1063.0,
                            346.0
                        ],
                        [
                            19015.0,
                            1063.0,
                            398.0
                        ],
                        [
                            19015.0,
                            1063.0,
                            398.0
                        ],
                        [
                            23515.0,
                            1063.0,
                            451.0
                        ],
                        [
                            23515.0,
                            1063.0,
                            451.0
                        ],
                        [
                            28015.0,
                            1063.0,
                            503.0
                        ],
                        [
                            28015.0,
                            1063.0,
                            503.0
                        ],
                        [
                            32515.0,
                            1063.0,
                            557.0
                        ],
                        [
                            32515.0,
                            1063.0,
                            557.0
                        ],
                        [
                            37015.0,
                            1063.0,
                            610.0
                        ],
                        [
                            37015.0,
                            1063.0,
                            610.0
                        ],
                        [
                            41515.0,
                            1063.0,
                            659.0
                        ],
                        [
                            41515.0,
                            1063.0,
                            659.0
                        ],
                        [
                            1015.0,
                            5413.0,
                            221.0
                        ],
                        [
                            1015.0,
                            5413.0,
                            221.0
                        ],
                        [
                            5515.0,
                            5413.0,
                            275.0
                        ],
                        [
                            5515.0,
                            5413.0,
                            275.0
                        ],
                        [
                            10015.0,
                            5413.0,
                            329.0
                        ],
                        [
                            10015.0,
                            5413.0,
                            329.0
                        ],
                        [
                            14515.0,
                            5413.0,
                            380.0
                        ],
                        [
                            14515.0,
                            5413.0,
                            380.0
                        ],
                        [
                            19015.0,
                            5413.0,
                            434.0
                        ],
                        [
                            19015.0,
                            5413.0,
                            434.0
                        ],
                        [
                            23515.0,
                            5413.0,
                            485.0
                        ],
                        [
                            23515.0,
                            5413.0,
                            485.0
                        ],
                        [
                            28015.0,
                            5413.0,
                            535.0
                        ],
                        [
                            28015.0,
                            5413.0,
                            535.0
                        ],
                        [
                            32515.0,
                            5413.0,
                            587.0
                        ],
                        [
                            32515.0,
                            5413.0,
                            587.0
                        ],
                        [
                            37015.0,
                            5413.0,
                            639.0
                        ],
                        [
                            37015.0,
                            5413.0,
                            639.0
                        ],
                        [
                            41515.0,
                            5413.0,
                            690.0
                        ],
                        [
                            41515.0,
                            5413.0,
                            690.0
                        ],
                        [
                            1015.0,
                            9763.0,
                            250.0
                        ],
                        [
                            1015.0,
                            9763.0,
                            250.0
                        ],
                        [
                            5515.0,
                            9763.0,
                            306.0
                        ],
                        [
                            5515.0,
                            9763.0,
                            306.0
                        ],
                        [
                            10015.0,
                            9763.0,
                            357.0
                        ],
                        [
                            10015.0,
                            9763.0,
                            357.0
                        ],
                        [
                            14515.0,
                            9763.0,
                            410.0
                        ],
                        [
                            14515.0,
                            9763.0,
                            410.0
                        ],
                        [
                            19015.0,
                            9763.0,
                            462.0
                        ],
                        [
                            19015.0,
                            9763.0,
                            462.0
                        ],
                        [
                            23515.0,
                            9763.0,
                            513.0
                        ],
                        [
                            23515.0,
                            9763.0,
                            513.0
                        ],
                        [
                            28015.0,
                            9763.0,
                            565.0
                        ],
                        [
                            28015.0,
                            9763.0,
                            565.0
                        ],
                        [
                            32515.0,
                            9763.0,
                            616.0
                        ],
                        [
                            32515.0,
                            9763.0,
                            616.0
                        ],
                        [
                            37015.0,
                            9763.0,
                            667.0
                        ],
                        [
                            37015.0,
                            9763.0,
                            667.0
                        ],
                        [
                            41515.0,
                            9763.0,
                            715.0
                        ],
                        [
                            41515.0,
                            9763.0,
                            715.0
                        ],
                        [
                            1015.0,
                            14113.0,
                            274.0
                        ],
                        [
                            1015.0,
                            14113.0,
                            274.0
                        ],
                        [
                            5515.0,
                            14113.0,
                            330.0
                        ],
                        [
                            5515.0,
                            14113.0,
                            330.0
                        ],
                        [
                            10015.0,
                            14113.0,
                            385.0
                        ],
                        [
                            10015.0,
                            14113.0,
                            385.0
                        ],
                        [
                            14515.0,
                            14113.0,
                            437.0
                        ],
                        [
                            14515.0,
                            14113.0,
                            437.0
                        ],
                        [
                            19015.0,
                            14113.0,
                            491.0
                        ],
                        [
                            19015.0,
                            14113.0,
                            491.0
                        ],
                        [
                            23515.0,
                            14113.0,
                            542.0
                        ],
                        [
                            23515.0,
                            14113.0,
                            542.0
                        ],
                        [
                            28015.0,
                            14113.0,
                            592.0
                        ],
                        [
                            28015.0,
                            14113.0,
                            592.0
                        ],
                        [
                            32515.0,
                            14113.0,
                            643.0
                        ],
                        [
                            32515.0,
                            14113.0,
                            643.0
                        ],
                        [
                            37015.0,
                            14113.0,
                            693.0
                        ],
                        [
                            37015.0,
                            14113.0,
                            693.0
                        ],
                        [
                            41515.0,
                            14113.0,
                            743.0
                        ],
                        [
                            41515.0,
                            14113.0,
                            743.0
                        ],
                        [
                            1015.0,
                            18463.0,
                            300.0
                        ],
                        [
                            1015.0,
                            18463.0,
                            300.0
                        ],
                        [
                            5515.0,
                            18463.0,
                            358.0
                        ],
                        [
                            5515.0,
                            18463.0,
                            358.0
                        ],
                        [
                            10015.0,
                            18463.0,
                            411.0
                        ],
                        [
                            10015.0,
                            18463.0,
                            411.0
                        ],
                        [
                            14515.0,
                            18463.0,
                            463.0
                        ],
                        [
                            14515.0,
                            18463.0,
                            463.0
                        ],
                        [
                            19015.0,
                            18463.0,
                            517.0
                        ],
                        [
                            19015.0,
                            18463.0,
                            517.0
                        ],
                        [
                            23515.0,
                            18463.0,
                            567.0
                        ],
                        [
                            23515.0,
                            18463.0,
                            567.0
                        ],
                        [
                            28015.0,
                            18463.0,
                            618.0
                        ],
                        [
                            28015.0,
                            18463.0,
                            618.0
                        ],
                        [
                            32515.0,
                            18463.0,
                            669.0
                        ],
                        [
                            32515.0,
                            18463.0,
                            669.0
                        ],
                        [
                            37015.0,
                            18463.0,
                            721.0
                        ],
                        [
                            37015.0,
                            18463.0,
                            721.0
                        ],
                        [
                            41515.0,
                            18463.0,
                            769.0
                        ],
                        [
                            41515.0,
                            18463.0,
                            769.0
                        ],
                        [
                            1015.0,
                            22813.0,
                            322.0
                        ],
                        [
                            1015.0,
                            22813.0,
                            322.0
                        ],
                        [
                            5515.0,
                            22813.0,
                            378.0
                        ],
                        [
                            5515.0,
                            22813.0,
                            378.0
                        ],
                        [
                            10015.0,
                            22813.0,
                            431.0
                        ],
                        [
                            10015.0,
                            22813.0,
                            431.0
                        ],
                        [
                            14515.0,
                            22813.0,
                            483.0
                        ],
                        [
                            14515.0,
                            22813.0,
                            483.0
                        ],
                        [
                            19015.0,
                            22813.0,
                            536.0
                        ],
                        [
                            19015.0,
                            22813.0,
                            536.0
                        ],
                        [
                            23515.0,
                            22813.0,
                            593.0
                        ],
                        [
                            23515.0,
                            22813.0,
                            593.0
                        ],
                        [
                            28015.0,
                            22813.0,
                            642.0
                        ],
                        [
                            28015.0,
                            22813.0,
                            642.0
                        ],
                        [
                            32515.0,
                            22813.0,
                            695.0
                        ],
                        [
                            32515.0,
                            22813.0,
                            695.0
                        ],
                        [
                            37015.0,
                            22813.0,
                            746.0
                        ],
                        [
                            37015.0,
                            22813.0,
                            746.0
                        ],
                        [
                            41515.0,
                            22813.0,
                            794.0
                        ],
                        [
                            41515.0,
                            22813.0,
                            794.0
                        ],
                        [
                            1015.0,
                            27163.0,
                            349.0
                        ],
                        [
                            1015.0,
                            27163.0,
                            349.0
                        ],
                        [
                            5515.0,
                            27163.0,
                            406.0
                        ],
                        [
                            5515.0,
                            27163.0,
                            406.0
                        ],
                        [
                            10015.0,
                            27163.0,
                            457.0
                        ],
                        [
                            10015.0,
                            27163.0,
                            457.0
                        ],
                        [
                            14515.0,
                            27163.0,
                            509.0
                        ],
                        [
                            14515.0,
                            27163.0,
                            509.0
                        ],
                        [
                            19015.0,
                            27163.0,
                            560.0
                        ],
                        [
                            19015.0,
                            27163.0,
                            560.0
                        ],
                        [
                            23515.0,
                            27163.0,
                            614.0
                        ],
                        [
                            23515.0,
                            27163.0,
                            614.0
                        ],
                        [
                            28015.0,
                            27163.0,
                            666.0
                        ],
                        [
                            28015.0,
                            27163.0,
                            666.0
                        ],
                        [
                            32515.0,
                            27163.0,
                            718.0
                        ],
                        [
                            32515.0,
                            27163.0,
                            718.0
                        ],
                        [
                            37015.0,
                            27163.0,
                            770.0
                        ],
                        [
                            37015.0,
                            27163.0,
                            770.0
                        ],
                        [
                            41515.0,
                            27163.0,
                            819.0
                        ],
                        [
                            41515.0,
                            27163.0,
                            819.0
                        ],
                        [
                            1015.0,
                            31513.0,
                            373.0
                        ],
                        [
                            1015.0,
                            31513.0,
                            373.0
                        ],
                        [
                            5515.0,
                            31513.0,
                            430.0
                        ],
                        [
                            5515.0,
                            31513.0,
                            430.0
                        ],
                        [
                            10015.0,
                            31513.0,
                            483.0
                        ],
                        [
                            10015.0,
                            31513.0,
                            483.0
                        ],
                        [
                            14515.0,
                            31513.0,
                            533.0
                        ],
                        [
                            14515.0,
                            31513.0,
                            533.0
                        ],
                        [
                            19015.0,
                            31513.0,
                            584.0
                        ],
                        [
                            19015.0,
                            31513.0,
                            584.0
                        ],
                        [
                            23515.0,
                            31513.0,
                            636.0
                        ],
                        [
                            23515.0,
                            31513.0,
                            636.0
                        ],
                        [
                            28015.0,
                            31513.0,
                            689.0
                        ],
                        [
                            28015.0,
                            31513.0,
                            689.0
                        ],
                        [
                            32515.0,
                            31513.0,
                            741.0
                        ],
                        [
                            32515.0,
                            31513.0,
                            741.0
                        ],
                        [
                            37015.0,
                            31513.0,
                            792.0
                        ],
                        [
                            37015.0,
                            31513.0,
                            792.0
                        ],
                        [
                            41515.0,
                            31513.0,
                            843.0
                        ],
                        [
                            41515.0,
                            31513.0,
                            843.0
                        ],
                        [
                            1015.0,
                            35863.0,
                            398.0
                        ],
                        [
                            1015.0,
                            35863.0,
                            398.0
                        ],
                        [
                            5515.0,
                            35863.0,
                            454.0
                        ],
                        [
                            5515.0,
                            35863.0,
                            454.0
                        ],
                        [
                            10015.0,
                            35863.0,
                            505.0
                        ],
                        [
                            10015.0,
                            35863.0,
                            505.0
                        ],
                        [
                            14515.0,
                            35863.0,
                            554.0
                        ],
                        [
                            14515.0,
                            35863.0,
                            554.0
                        ],
                        [
                            19015.0,
                            35863.0,
                            606.0
                        ],
                        [
                            19015.0,
                            35863.0,
                            606.0
                        ],
                        [
                            23515.0,
                            35863.0,
                            658.0
                        ],
                        [
                            23515.0,
                            35863.0,
                            658.0
                        ],
                        [
                            28015.0,
                            35863.0,
                            709.0
                        ],
                        [
                            28015.0,
                            35863.0,
                            709.0
                        ],
                        [
                            32515.0,
                            35863.0,
                            762.0
                        ],
                        [
                            32515.0,
                            35863.0,
                            762.0
                        ],
                        [
                            37015.0,
                            35863.0,
                            815.0
                        ],
                        [
                            37015.0,
                            35863.0,
                            815.0
                        ],
                        [
                            41515.0,
                            35863.0,
                            864.0
                        ],
                        [
                            41515.0,
                            35863.0,
                            864.0
                        ],
                        [
                            1015.0,
                            40213.0,
                            421.0
                        ],
                        [
                            1015.0,
                            40213.0,
                            421.0
                        ],
                        [
                            5515.0,
                            40213.0,
                            475.0
                        ],
                        [
                            5515.0,
                            40213.0,
                            475.0
                        ],
                        [
                            10015.0,
                            40213.0,
                            525.0
                        ],
                        [
                            10015.0,
                            40213.0,
                            525.0
                        ],
                        [
                            14515.0,
                            40213.0,
                            575.0
                        ],
                        [
                            14515.0,
                            40213.0,
                            575.0
                        ],
                        [
                            19015.0,
                            40213.0,
                            626.0
                        ],
                        [
                            19015.0,
                            40213.0,
                            626.0
                        ],
                        [
                            23515.0,
                            40213.0,
                            678.0
                        ],
                        [
                            23515.0,
                            40213.0,
                            678.0
                        ],
                        [
                            28015.0,
                            40213.0,
                            729.0
                        ],
                        [
                            28015.0,
                            40213.0,
                            729.0
                        ],
                        [
                            32515.0,
                            40213.0,
                            781.0
                        ],
                        [
                            32515.0,
                            40213.0,
                            781.0
                        ],
                        [
                            37015.0,
                            40213.0,
                            834.0
                        ],
                        [
                            37015.0,
                            40213.0,
                            834.0
                        ],
                        [
                            41515.0,
                            40213.0,
                            882.0
                        ],
                        [
                            41515.0,
                            40213.0,
                            882.0
                        ]
                    ]
                },
                "Institution": "LPNHE"
            },
            "Measurements": {
                "BACKSIDE_FLATNESS": {
                    "X": false,
                    "Unit": "um",
                    "Values": [
                        20.0
                    ]
                },
                "FLATNESS_MEASUREMENT_POINTS": {
                    "X": false,
                    "Unit": "um",
                    "Values": [
                        [
                            1015.0,
                            1063.0,
                            190.0
                        ],
                        [
                            1015.0,
                            1063.0,
                            190.0
                        ],
                        [
                            5515.0,
                            1063.0,
                            244.0
                        ],
                        [
                            5515.0,
                            1063.0,
                            244.0
                        ],
                        [
                            10015.0,
                            1063.0,
                            296.0
                        ],
                        [
                            10015.0,
                            1063.0,
                            296.0
                        ],
                        [
                            14515.0,
                            1063.0,
                            346.0
                        ],
                        [
                            14515.0,
                            1063.0,
                            346.0
                        ],
                        [
                            19015.0,
                            1063.0,
                            398.0
                        ],
                        [
                            19015.0,
                            1063.0,
                            398.0
                        ],
                        [
                            23515.0,
                            1063.0,
                            451.0
                        ],
                        [
                            23515.0,
                            1063.0,
                            451.0
                        ],
                        [
                            28015.0,
                            1063.0,
                            503.0
                        ],
                        [
                            28015.0,
                            1063.0,
                            503.0
                        ],
                        [
                            32515.0,
                            1063.0,
                            557.0
                        ],
                        [
                            32515.0,
                            1063.0,
                            557.0
                        ],
                        [
                            37015.0,
                            1063.0,
                            610.0
                        ],
                        [
                            37015.0,
                            1063.0,
                            610.0
                        ],
                        [
                            41515.0,
                            1063.0,
                            659.0
                        ],
                        [
                            41515.0,
                            1063.0,
                            659.0
                        ],
                        [
                            1015.0,
                            5413.0,
                            221.0
                        ],
                        [
                            1015.0,
                            5413.0,
                            221.0
                        ],
                        [
                            5515.0,
                            5413.0,
                            275.0
                        ],
                        [
                            5515.0,
                            5413.0,
                            275.0
                        ],
                        [
                            10015.0,
                            5413.0,
                            329.0
                        ],
                        [
                            10015.0,
                            5413.0,
                            329.0
                        ],
                        [
                            14515.0,
                            5413.0,
                            380.0
                        ],
                        [
                            14515.0,
                            5413.0,
                            380.0
                        ],
                        [
                            19015.0,
                            5413.0,
                            434.0
                        ],
                        [
                            19015.0,
                            5413.0,
                            434.0
                        ],
                        [
                            23515.0,
                            5413.0,
                            485.0
                        ],
                        [
                            23515.0,
                            5413.0,
                            485.0
                        ],
                        [
                            28015.0,
                            5413.0,
                            535.0
                        ],
                        [
                            28015.0,
                            5413.0,
                            535.0
                        ],
                        [
                            32515.0,
                            5413.0,
                            587.0
                        ],
                        [
                            32515.0,
                            5413.0,
                            587.0
                        ],
                        [
                            37015.0,
                            5413.0,
                            639.0
                        ],
                        [
                            37015.0,
                            5413.0,
                            639.0
                        ],
                        [
                            41515.0,
                            5413.0,
                            690.0
                        ],
                        [
                            41515.0,
                            5413.0,
                            690.0
                        ],
                        [
                            1015.0,
                            9763.0,
                            250.0
                        ],
                        [
                            1015.0,
                            9763.0,
                            250.0
                        ],
                        [
                            5515.0,
                            9763.0,
                            306.0
                        ],
                        [
                            5515.0,
                            9763.0,
                            306.0
                        ],
                        [
                            10015.0,
                            9763.0,
                            357.0
                        ],
                        [
                            10015.0,
                            9763.0,
                            357.0
                        ],
                        [
                            14515.0,
                            9763.0,
                            410.0
                        ],
                        [
                            14515.0,
                            9763.0,
                            410.0
                        ],
                        [
                            19015.0,
                            9763.0,
                            462.0
                        ],
                        [
                            19015.0,
                            9763.0,
                            462.0
                        ],
                        [
                            23515.0,
                            9763.0,
                            513.0
                        ],
                        [
                            23515.0,
                            9763.0,
                            513.0
                        ],
                        [
                            28015.0,
                            9763.0,
                            565.0
                        ],
                        [
                            28015.0,
                            9763.0,
                            565.0
                        ],
                        [
                            32515.0,
                            9763.0,
                            616.0
                        ],
                        [
                            32515.0,
                            9763.0,
                            616.0
                        ],
                        [
                            37015.0,
                            9763.0,
                            667.0
                        ],
                        [
                            37015.0,
                            9763.0,
                            667.0
                        ],
                        [
                            41515.0,
                            9763.0,
                            715.0
                        ],
                        [
                            41515.0,
                            9763.0,
                            715.0
                        ],
                        [
                            1015.0,
                            14113.0,
                            274.0
                        ],
                        [
                            1015.0,
                            14113.0,
                            274.0
                        ],
                        [
                            5515.0,
                            14113.0,
                            330.0
                        ],
                        [
                            5515.0,
                            14113.0,
                            330.0
                        ],
                        [
                            10015.0,
                            14113.0,
                            385.0
                        ],
                        [
                            10015.0,
                            14113.0,
                            385.0
                        ],
                        [
                            14515.0,
                            14113.0,
                            437.0
                        ],
                        [
                            14515.0,
                            14113.0,
                            437.0
                        ],
                        [
                            19015.0,
                            14113.0,
                            491.0
                        ],
                        [
                            19015.0,
                            14113.0,
                            491.0
                        ],
                        [
                            23515.0,
                            14113.0,
                            542.0
                        ],
                        [
                            23515.0,
                            14113.0,
                            542.0
                        ],
                        [
                            28015.0,
                            14113.0,
                            592.0
                        ],
                        [
                            28015.0,
                            14113.0,
                            592.0
                        ],
                        [
                            32515.0,
                            14113.0,
                            643.0
                        ],
                        [
                            32515.0,
                            14113.0,
                            643.0
                        ],
                        [
                            37015.0,
                            14113.0,
                            693.0
                        ],
                        [
                            37015.0,
                            14113.0,
                            693.0
                        ],
                        [
                            41515.0,
                            14113.0,
                            743.0
                        ],
                        [
                            41515.0,
                            14113.0,
                            743.0
                        ],
                        [
                            1015.0,
                            18463.0,
                            300.0
                        ],
                        [
                            1015.0,
                            18463.0,
                            300.0
                        ],
                        [
                            5515.0,
                            18463.0,
                            358.0
                        ],
                        [
                            5515.0,
                            18463.0,
                            358.0
                        ],
                        [
                            10015.0,
                            18463.0,
                            411.0
                        ],
                        [
                            10015.0,
                            18463.0,
                            411.0
                        ],
                        [
                            14515.0,
                            18463.0,
                            463.0
                        ],
                        [
                            14515.0,
                            18463.0,
                            463.0
                        ],
                        [
                            19015.0,
                            18463.0,
                            517.0
                        ],
                        [
                            19015.0,
                            18463.0,
                            517.0
                        ],
                        [
                            23515.0,
                            18463.0,
                            567.0
                        ],
                        [
                            23515.0,
                            18463.0,
                            567.0
                        ],
                        [
                            28015.0,
                            18463.0,
                            618.0
                        ],
                        [
                            28015.0,
                            18463.0,
                            618.0
                        ],
                        [
                            32515.0,
                            18463.0,
                            669.0
                        ],
                        [
                            32515.0,
                            18463.0,
                            669.0
                        ],
                        [
                            37015.0,
                            18463.0,
                            721.0
                        ],
                        [
                            37015.0,
                            18463.0,
                            721.0
                        ],
                        [
                            41515.0,
                            18463.0,
                            769.0
                        ],
                        [
                            41515.0,
                            18463.0,
                            769.0
                        ],
                        [
                            1015.0,
                            22813.0,
                            322.0
                        ],
                        [
                            1015.0,
                            22813.0,
                            322.0
                        ],
                        [
                            5515.0,
                            22813.0,
                            378.0
                        ],
                        [
                            5515.0,
                            22813.0,
                            378.0
                        ],
                        [
                            10015.0,
                            22813.0,
                            431.0
                        ],
                        [
                            10015.0,
                            22813.0,
                            431.0
                        ],
                        [
                            14515.0,
                            22813.0,
                            483.0
                        ],
                        [
                            14515.0,
                            22813.0,
                            483.0
                        ],
                        [
                            19015.0,
                            22813.0,
                            536.0
                        ],
                        [
                            19015.0,
                            22813.0,
                            536.0
                        ],
                        [
                            23515.0,
                            22813.0,
                            593.0
                        ],
                        [
                            23515.0,
                            22813.0,
                            593.0
                        ],
                        [
                            28015.0,
                            22813.0,
                            642.0
                        ],
                        [
                            28015.0,
                            22813.0,
                            642.0
                        ],
                        [
                            32515.0,
                            22813.0,
                            695.0
                        ],
                        [
                            32515.0,
                            22813.0,
                            695.0
                        ],
                        [
                            37015.0,
                            22813.0,
                            746.0
                        ],
                        [
                            37015.0,
                            22813.0,
                            746.0
                        ],
                        [
                            41515.0,
                            22813.0,
                            794.0
                        ],
                        [
                            41515.0,
                            22813.0,
                            794.0
                        ],
                        [
                            1015.0,
                            27163.0,
                            349.0
                        ],
                        [
                            1015.0,
                            27163.0,
                            349.0
                        ],
                        [
                            5515.0,
                            27163.0,
                            406.0
                        ],
                        [
                            5515.0,
                            27163.0,
                            406.0
                        ],
                        [
                            10015.0,
                            27163.0,
                            457.0
                        ],
                        [
                            10015.0,
                            27163.0,
                            457.0
                        ],
                        [
                            14515.0,
                            27163.0,
                            509.0
                        ],
                        [
                            14515.0,
                            27163.0,
                            509.0
                        ],
                        [
                            19015.0,
                            27163.0,
                            560.0
                        ],
                        [
                            19015.0,
                            27163.0,
                            560.0
                        ],
                        [
                            23515.0,
                            27163.0,
                            614.0
                        ],
                        [
                            23515.0,
                            27163.0,
                            614.0
                        ],
                        [
                            28015.0,
                            27163.0,
                            666.0
                        ],
                        [
                            28015.0,
                            27163.0,
                            666.0
                        ],
                        [
                            32515.0,
                            27163.0,
                            718.0
                        ],
                        [
                            32515.0,
                            27163.0,
                            718.0
                        ],
                        [
                            37015.0,
                            27163.0,
                            770.0
                        ],
                        [
                            37015.0,
                            27163.0,
                            770.0
                        ],
                        [
                            41515.0,
                            27163.0,
                            819.0
                        ],
                        [
                            41515.0,
                            27163.0,
                            819.0
                        ],
                        [
                            1015.0,
                            31513.0,
                            373.0
                        ],
                        [
                            1015.0,
                            31513.0,
                            373.0
                        ],
                        [
                            5515.0,
                            31513.0,
                            430.0
                        ],
                        [
                            5515.0,
                            31513.0,
                            430.0
                        ],
                        [
                            10015.0,
                            31513.0,
                            483.0
                        ],
                        [
                            10015.0,
                            31513.0,
                            483.0
                        ],
                        [
                            14515.0,
                            31513.0,
                            533.0
                        ],
                        [
                            14515.0,
                            31513.0,
                            533.0
                        ],
                        [
                            19015.0,
                            31513.0,
                            584.0
                        ],
                        [
                            19015.0,
                            31513.0,
                            584.0
                        ],
                        [
                            23515.0,
                            31513.0,
                            636.0
                        ],
                        [
                            23515.0,
                            31513.0,
                            636.0
                        ],
                        [
                            28015.0,
                            31513.0,
                            689.0
                        ],
                        [
                            28015.0,
                            31513.0,
                            689.0
                        ],
                        [
                            32515.0,
                            31513.0,
                            741.0
                        ],
                        [
                            32515.0,
                            31513.0,
                            741.0
                        ],
                        [
                            37015.0,
                            31513.0,
                            792.0
                        ],
                        [
                            37015.0,
                            31513.0,
                            792.0
                        ],
                        [
                            41515.0,
                            31513.0,
                            843.0
                        ],
                        [
                            41515.0,
                            31513.0,
                            843.0
                        ],
                        [
                            1015.0,
                            35863.0,
                            398.0
                        ],
                        [
                            1015.0,
                            35863.0,
                            398.0
                        ],
                        [
                            5515.0,
                            35863.0,
                            454.0
                        ],
                        [
                            5515.0,
                            35863.0,
                            454.0
                        ],
                        [
                            10015.0,
                            35863.0,
                            505.0
                        ],
                        [
                            10015.0,
                            35863.0,
                            505.0
                        ],
                        [
                            14515.0,
                            35863.0,
                            554.0
                        ],
                        [
                            14515.0,
                            35863.0,
                            554.0
                        ],
                        [
                            19015.0,
                            35863.0,
                            606.0
                        ],
                        [
                            19015.0,
                            35863.0,
                            606.0
                        ],
                        [
                            23515.0,
                            35863.0,
                            658.0
                        ],
                        [
                            23515.0,
                            35863.0,
                            658.0
                        ],
                        [
                            28015.0,
                            35863.0,
                            709.0
                        ],
                        [
                            28015.0,
                            35863.0,
                            709.0
                        ],
                        [
                            32515.0,
                            35863.0,
                            762.0
                        ],
                        [
                            32515.0,
                            35863.0,
                            762.0
                        ],
                        [
                            37015.0,
                            35863.0,
                            815.0
                        ],
                        [
                            37015.0,
                            35863.0,
                            815.0
                        ],
                        [
                            41515.0,
                            35863.0,
                            864.0
                        ],
                        [
                            41515.0,
                            35863.0,
                            864.0
                        ],
                        [
                            1015.0,
                            40213.0,
                            421.0
                        ],
                        [
                            1015.0,
                            40213.0,
                            421.0
                        ],
                        [
                            5515.0,
                            40213.0,
                            475.0
                        ],
                        [
                            5515.0,
                            40213.0,
                            475.0
                        ],
                        [
                            10015.0,
                            40213.0,
                            525.0
                        ],
                        [
                            10015.0,
                            40213.0,
                            525.0
                        ],
                        [
                            14515.0,
                            40213.0,
                            575.0
                        ],
                        [
                            14515.0,
                            40213.0,
                            575.0
                        ],
                        [
                            19015.0,
                            40213.0,
                            626.0
                        ],
                        [
                            19015.0,
                            40213.0,
                            626.0
                        ],
                        [
                            23515.0,
                            40213.0,
                            678.0
                        ],
                        [
                            23515.0,
                            40213.0,
                            678.0
                        ],
                        [
                            28015.0,
                            40213.0,
                            729.0
                        ],
                        [
                            28015.0,
                            40213.0,
                            729.0
                        ],
                        [
                            32515.0,
                            40213.0,
                            781.0
                        ],
                        [
                            32515.0,
                            40213.0,
                            781.0
                        ],
                        [
                            37015.0,
                            40213.0,
                            834.0
                        ],
                        [
                            37015.0,
                            40213.0,
                            834.0
                        ],
                        [
                            41515.0,
                            40213.0,
                            882.0
                        ],
                        [
                            41515.0,
                            40213.0,
                            882.0
                        ]
                    ]
                }
            },
            "BACKSIDE_FLATNESS": null,
            "FLATNESS_MEASUREMENT_POINTS": null
        },
        "stage": "MODULE/FINAL_METROLOGY",
        "dbVersion": 1.01
    }
]